| Sample Size |
4inch ~(Optional) |
| Tact Time |
20~80min Depends in the number of mask |
| Loading Capacity |
Glass 1sheet. Mask 4Sheet |
| Transfer Method |
Vacuum Robot |
| Vacuum Performance |
Deposition <2E-7 Torr |
| Alignment accuracy |
Mechanical less than ±5um |
| Evaporation source for organic |
5ea, 10cc for host,4cc for dopant |
| Evaporation source for metal |
2ea Thermal source, E-Beam is optional |
| Deposition Uniformity |
Organic, Metal, Sputter less than ±3% |
| Max.Deposition Rate |
Organic 5A/sec, Metal 10A/sec |
| Rate Accuracy |
Organic ±5%, Metal ±7% |
| Thickness reliability |
Organic & Metal ±5% glass to glass |
| Doping ratio |
Less than 1% at 1A/sec of host |
| Conductive Oxide |
Low Damage Sputtering(FTS or general Sputter |
| Thin Film Passivation |
Parylene coating & inoirganic coating |
| Glove Box |
H2O, O2, less than 0.1ppm |
| Full automation system (Option). |
|
