EASYPANEL-CVD

Meets Safety, Process, Purity and Budgetary Goals.
Our EasyPanel™ UHP manual gas panels are designed for high and low pressure, ultra-high purity (UHP) gas delivery. Typically used for non-hazardous purge and process gas delivery applications, the EasyPanel™ Series offers 1, 2, 3, 4 and 6-valve designs.

The plumbing design ensures low entrapped volumes and minimized dead-legs for increased purity. The modular design concept allows the customer to tailor each system to meet their safety, process, purity and budgetary goals.

The product configurations range from the simplest 1-valve design for non-hazardous use up to a 6-valve design that offers high pressure vent, low pressure vent, deep purge, and venturi assisted EVAC. MicroLine series UHP gas panels can also be fitted with a myriad of options including pressure relief, filtration, restrictive flow orifices, flexible pigtails, and more.

STANDART CONFIGURATION

    Cylinder cabinets:

  • 1-Valve [pre-regulator shutoff].
  • 2-Valve [adds HP vent].
  • 3-Valve [adds post-regulator shutoff].
  • 4-Valve [adds PURGE].
  • 4-Valve DP [adds DEEP PURGE PIGTAIL].
  • 6-Valve [adds LP vent and EVAC].

    Codes and standards:

  • SME Section IX.
  • SEMI™ S2 Safety Guidelines for Semiconductor Manufacturing Equipment.
  • NFPA® 79, 496, 70 [NEC®].
  • Factoryual®.
  • UL®.
  • CE®.

FACILITIES REQUIREMENTS

  • Dimensions : 10.5″W x 15.5″H.