PRODUCTS

14NRE4000-2

NRE-4000

A stand-alone system with shower-head gas distribution and water cooled RF platen. It has a 13” cylindrical Aluminum chamber. Four levels of authorization. The RF power is provided by 600 W 13.5 MHz power supply, and auto-tuner. 26’’ x 44” W Footprint.

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NRE3500

NRE-3500

A stand-alone compact system with shower-head gas distribution and water cooled RF platen. It has a 13” cylindrical Aluminum chamber. Four levels of authorization. The RF power is provided by 600 W 13.5 MHz power supply, and auto-tuner. 26” x 26” W Footprint.

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15NRE3000

NRE-3000

Table top unit with shower-head gas distribution and water cooled RF platen. It has a 13” cylindrical Aluminum chamber. Four levels of authorization. The RF power is provided by 600 W 13.5 MHz power supply. 26” x 26” W Footprint.

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