EASYGAS1000-CVD

The EasyGas™ 1000 gas cabinet is designed to cover a wide range of cylinder gas delivery applications.

In its simplest form, the EasyGas™ gas cabinet houses 1, 2, 3 or 4 gases, and includes a high purity, manual gas panel for each gas. Modular EasyGas™ panels are available in 1, 2, 3, 4, 5 and 6-valve designs for process and instrumentation diagrams. Each panel may be tailored to the specific gas and application.

With the addition of the optional FlexPowr™ controller, the EasyGas™ cabinet can support a myriad of automated alarm and panel shutdown options such as: auto-switchover, excess flow sensors, low cylinder pressure alarms, high delivery pressure alarms, gas leak sensors, Scales and more. The FlexPowr™ controller can support up to eight (8) user-settable alarm inputs and eight (8) user-settable alarm outputs.

EasyGas™ 1000 makes it simple to meet your exact gas delivery needs. Our modular design concept allows you to use a building-block method to configure a gas cabinet to your specifications.

STANDARD CONFIGURATION

    Cylinder Cabinets:

  • 1-cyl, [1-process].
  • 2-cyl, [1-process, 1-purge].
  • 2-cyl, [2-process]*.
  • 3-cyl, [3-process]*.
  • 3-cyl, [2-process, 1-purge].
  • * Purge SideCar is an external, integrated purge cylinder.

    Gas Panel / Manifold Purity:

  • UHP construction: orbitally welded/VCR® 316L SS or VIM/VAR.
  • UHP grade regulator (nontied diaphragm standard).
  • UHP grade diaphragm valves (20 Ra standard).

    HP Gas Panels:

  • 3-Valve design [HP vent].
  • 4-Valve design [adds PURGE].
  • 6-Valve design [adds EVAC].

    UHP Gas Panels:

  • 25 Ra surface finish.
  • Dual stage regulators.
  • Outlet filters (0.003 µm).
  • DISS cylinder fittings.
  • 3-Valve process gas panel [adds HP vent, 1-Valve is standard].

    Optional FlexPowr™ Controller:

  • Automatic shutdown of process gas panels.
  • Up to 8 user-definable alarms.
  • Up to 8 user-definable outputs.
  • Audible/visible alarm indication.
  • EMO button.
  • Multilevel password protection.
  • CLASS 100/CLASS 10 clean room assembly and test.

    FlexPowr™ Control Components:

  • Exhaust pressure switch.
  • HI cylinder pressure switch.
  • HI delivery pressure switch.
  • Integrated gas leak detection.
  • UVIR detection.
  • Excess flow sensor.

    Other Equipment Options:

  • Adjustable cylinder shelves.
  • Restrictive flow orifices.
  • Cylinder scales.
  • CGA torque wrenches.

    Dimensions:

  • 1-cil: 18 “W x 72” H x 19 “D .
  • 2-cil: 24″ W x 72″ H x 19″ D .
  • 3-cil: 36″ W x 72″ H x 19″ D .

    Codes & standards:

  • ASME Section IX.
  • SEMI® S2 Safety Guidelines for Semiconductor Manufacturing Equipment.
  • NFPA® 79, 496, 70 [NEC®].
  • Factory Mutual®.
  • UL®.
  • CE®.

FACILITIES REQUIREMENTS

  • Process Purge : Adjustable to 85 psig 30 slm máx.
  • Vacuum Drive : Adjustable to 85 psig 85 slm máx.
  • Process Vent : > 1.0″WC 100 slm.
  • Pneumatic Supply: Adjustable to 90 psig 1 slm máx.
  • Electrical : 115V/3A N/A.
  • Sprinkler (if used): 30 psig 31 gpm.
  • Exhaust : > 0,15″ WC 300 scfm (2-cil), 450 scfm (3-cil).

*Note: Electrical varies with country; facilities requirements vary with system options. Consult Factory for details.