sistema de células solares


  • CIGS Thin Film Solar Cell.


Deposition Thickness Up to several 1000 A for Mo, CIGS, ZnO film
Film thickness uniformity <±5%
Film sheet resistance uniformity <±5% for Mo Film
Temperature uniformity <±3% on plate and Z-direction
Substrate Size Glass and Flexible metal, 4 inch
Deposition Mo film deposition by DC magnetron sputtering method
CIGS film deposition by MBE
Intrinsic and n type ZnO films by RF magnetron sputtering method
Vacuum chamber 6- Way Transfer chamber, LoadLock Chamber,
MBE Chamber, Mo-ZnO sputtering Chamber