EasyGas-CVD

The EasyGas™ 1500 fully automated gas cabinet is representative of continuous drive and commitment to providing the industry’s safest and most reliable ultra-high purity (UHP) specialty gas distribution systems available.

Mass configuration and modular design concepts of the gas panels, controls architecture and cabinet enclosure have combined to widen the product configuration spectrum and greatly increase user flexibility.

The EasyGas™ 1500 makes it simple to meet your exact gas distribution needs. Our modular design concept allows for component-level replacement, ease of service and upgradeability.

STANDARD CONFIGURATION

    Cylinder cabinets:

  • 2-cyl, [1-process, 1-purge].
  • 2-cyl, [2-process], external purge source.
  • 3 cyl, [2-process, 1-purge].
  • Independent out or autoswitchover.
  • Cabinet-to-cabinet switchover.

    Standard Controls / Features:

  • PLC control of all critical functions.
  • Bright 10.4″ color touch screen interface.
  • Proven auto-sequenced routines for all aspects of operations and maintenance.
  • User settable limits for all process and alarm parameters.
  • Exhaust pressure monitor.
  • On-screen warnings, alarms, prompting and instructions.
  • Emergency Off (EMO).
  • EMO and EGO inputs.
  • Alarm outputs.
  • Multi-level password protection.
  • Diagnostics screen.
  • Valve cycle count screen.
  • Z-Purge ready for Class I Div II compliance.

    Process Panel Features:

  • Ultra-High Purity (UHP) 316L SS or VAR construction.
  • Surface finish 10 Ra avg. or better.
  • Springless diaphragm valves.
  • Tied-diaphragm process regulator.
  • Precision flow sensor.
  • Vacuum assisted purging.
  • UHP orbitally welded with strategic VCR® breaks.
  • Helium leak tested to 1.0 x 10-9 atm*cc/s.
  • CLASS 100/CLASS 10 cleanroom assembly and testing.

    Dimensions:

  • 1-cil: 18 “W x 84” H x 19 “D.
  • 2-cil: 24″ W x 84″ H x 19″ D.
  • 3-cil: 36″ W x 84″ H x 19″ D.

    Codes & standards:

  • SME Section IX.
  • SEMI™ S2 Safety Guidelines for Semiconductor Manufacturing Equipment.
  • NFPA® 79, 496, 70 [NEC®].
  • Factory Mutual®.
  • UL®.
  • CE®.

FACILITIES REQUIREMENTS

  • Process Purge : Adjustable to 80 psig 30 slm máx.
  • Vacuum Drive : Adjustable to 85 psig 85 slm máx.
  • Process Vent : > 1.0″WC 100 slm.
  • Pneumatic Supply: Adjustable to 90 psig 1 slm máx.
  • Electrical : 115V/3A N/A.
  • Sprinkler (if used): 30 psig 31 gpm.
  • Exhaust : > 0,15″ WC 300 scfm (2-cil), 450 scfm (3-cil).

*Note: Electrical varies with country; facilities requirements vary with system options. Consult Factory for details.