APPLICATIONS
- CIGS Thin Film Solar Cell.
SPECIFICATIONS
| Deposition Thickness | Up to several 1000 A for Mo, CIGS, ZnO film |
| Film thickness uniformity | <±5% |
| Film sheet resistance uniformity | <±5% for Mo Film |
| Temperature uniformity | <±3% on plate and Z-direction |
| Substrate Size | Glass and Flexible metal, 4 inch |
| Deposition | Mo film deposition by DC magnetron sputtering method CIGS film deposition by MBE Intrinsic and n type ZnO films by RF magnetron sputtering method |
| Vacuum chamber | 6- Way Transfer chamber, LoadLock Chamber, MBE Chamber, Mo-ZnO sputtering Chamber |
