FEATURES
- Touch panel control.
- Easy operation.
- Adopt Drain, Exhaust hole in bowl.
SPECIFICATIONS
| Type | Spin coater system |
| Substrate size | Piece ~ up to 12″ circle |
| Rotation speed | Max. 5,000 rpm AC Servo Motor |
| Spin state | 20 steps, 20 recipes |
| Acceleration/Deceleration rate | Variable |
| Chuck material | Anodized AL |
| Electric power | 220V, 5A |
| Oilless vacuum pump pressure | -650mmHg |
| Dimensions(mm) | 650 x 945 x 1200 |
