FEATURES
- Easy operation UI.
- PC Operation with PLC control.
- Image grab & Data log.
- More than 100 Program recipes.
- Motorized joystick control.
- Microscope position control system.
SPECIFICATIONS
| Type | Joystick control Semi-Auto (Mask Aligner) |
| Mask size | up to 610 x 610(User spec.) |
| Substrate size | 500 x 500 (User spec.) |
| UV lamp & Power | 2kW & power supply 5 kW & power supply |
| Uniform beam size | 600 x 600(User spec.) |
| Beam Uniformity | <±7% |
| Beam wavelength | 350 ~ 450nm |
| Process mode | Soft, Hard contact & Proximity |
| Substrate chuck moving | x,y, z & θ (Motorized) |
| Options | CCD BSA UV Intensity meter |
