APPLICATIONS
- Silicon Thin Film Solar Cell.
SPECIFICATIONS
| Sample Size | 4 inch |
| Power Source | RF 13.56MHz, VHF 60MHz |
| Deposition Type | PE-CVD, VHFCVD |
| Plasma Type | Direct Plasma |
| Substrate Temperature | Max. 450°C |
| Temperature Uniformity | < ±3% |
| High Vacuum Pumping | Rotary + TMP + Booster |
| Ultimate Pressure | 5 x 10-6Torr within 60min |
| Full Automation Control System Using PC Interface |
