PRODUCTS
NRE-4000
A stand-alone system with shower-head gas distribution and water cooled RF platen. It has a 13” cylindrical Aluminum chamber. Four levels of authorization. The RF power is provided by 600 W 13.5 MHz power supply, and auto-tuner. 26’’ x 44” W Footprint.
NRE-3500
A stand-alone compact system with shower-head gas distribution and water cooled RF platen. It has a 13” cylindrical Aluminum chamber. Four levels of authorization. The RF power is provided by 600 W 13.5 MHz power supply, and auto-tuner. 26” x 26” W Footprint.
NRE-3000
Table top unit with shower-head gas distribution and water cooled RF platen. It has a 13” cylindrical Aluminum chamber. Four levels of authorization. The RF power is provided by 600 W 13.5 MHz power supply. 26” x 26” W Footprint.
