FEATURES
- Compact unit for various coating solutions.
- Programmable Recipe management.
- Easy operation.
- Adopt Drain, Exhaust hole in bowl.
SPECIFICATIONS
| Type | Spin coater system |
| Substrate size | piece ~ up to 6″ circle |
| Rotation speed | 300 ~ 7,000rpm an error of less than 1% DC Servo Motor |
| Spin state | 50 steps, 20 recipes |
| Bowl size | 12″, Stainless steel |
| Acceleration/Deceleration rate | Variable |
| Chuck material | Anodized AL, Acetal |
| Electric power | 220V, 5A |
| Oiless vacuum pump pressure | -650mmHg |
| Dimensions(mm) | 390(D)x570(W)x280(H) |
