FEATURES
- Easy operation UI.
- PC Operation with PLC control.
- Image grab & Data log.
- More than 100 Program recipes.
- Motorized joystick control.
SPECIFICATIONS
| Type | Joystick control Semi-Auto (Mask Aligner) |
| Mask size | up to 9″ x 9″ |
| Substrate size | piece to 8″ x 8″ |
| UV lamp & Power | 2kW & power supply |
| Uniform beam size | 10.25″ x 10.25″ |
| Beam Uniformity | <±3~5% |
| Beam wavelength | 350 ~ 450nm |
| 365nm Intensity | 15~25mW/cm2 |
| Alignment accuracy | 1um |
| Process resolution | 1um@1um PR thickness with vacuum contact |
| Process mode | Soft, Hard, Vacuum contact & Proximity |
| Substrate chuck moving | x,y, z & θ (Motorized) |
| Options | CCD BSA UV Intensity meter |
