FEATURES
- Easy operation & Installation.
- PC Operation with PLC control.
- Image grab & Data log.
- More than 100 Program recipes.
SPECIFICATIONS
| Type | Manual (PC control) |
| Mask size | up to 7″ x 7″ |
| Substrate size | piece to 6″ x 6″ |
| UV lamp & Power | 1kW & power supply |
| Uniform beam size | 6.25″ x 6.25″ |
| Beam Uniformity | <±5% |
| Beam wavelength | 350 ~ 450nm |
| 365nm Intensity | 15~25mW/cm2 |
| Alignment accuracy | 1um |
| Process resolution | 1um@1um PR thickness with vacuum contact |
| Process mode | Soft, Hard, Vacuum contact & Proximity |
| Substrate chuck moving | x,y (Manual),z & θ (Motorized) |
| Options | CCD BSA UV Intensity meter |
