FEATURES
- Deposit large-scale thin-film.
- Hetero structure metal oxide (e.g. Fe/SrTiO3, Nb/SrTiO3, BiFeO3, etc).
- Multi-functional extension compatibility.
- 12’’ – 18’’ spherical chamber.
- 4-axis (XYZR) manipulator with laser heating system.
- Heating temperature above 1200ºC ± 1ºC (in O2 or O3).
- 6 1-inch planetary target holder.
- Single/dual mask system.
- Pressure control system: upstream/downstream.
- High pressure RHEED.
