FEATURES
- Easy operation & Installation.
- Handling Substrates of Various sizes.
- PLC control with Touch screen panel.
SPECIFICATIONS
| Type | Fully manual (Mask Aligner) |
| Mask size | up to 5″ x 5″ |
| Substrate size. | piece to 4″ dia |
| UV lamp & Power | 350W & power supply |
| Uniform beam size | 6.25″ x 6.25″ |
| Beam Uniformity | <±5% |
| Beam wavelength | 350 ~ 450nm |
| 365nm Intensity | ~25mW/cm2 |
| Alignment accuracy | 1um |
| Process resolution | 1um@1um PR thickness with vacuum contact |
| Process mode | Soft, Hard, Vacuum contact & Proximity |
| Substrate chuck moving | x,y,z & θ |
| Options | Anti-Vibration table IR BSA UV Intensity meter UV-LED(365nm) exposure module |
