The EasyTube® 101 system is an advanced tool for CVD process for university research groups and industrial R&D labs.
Up to 8 input lines are available for gases. 3 of the input lines can be configured for vapor delivery of solid or liquid sources. The system can be configured for vacuum and/or atmospheric processes. The system has a usable processing area of 25 mm x 50 mm and most system options are available as upgrades after installation.
The system is designed to meet today’s safety standards for handling pyrophoric, corrosive, flammable, and toxic gases such as hydrogen, silane, germane, diborane, hydrogen chloride, and metal organic precursors. The system has application configured safety protocols embedded into relay logic, PLC, and CVDWinPrCTM software.
Our entry level EasyTube® 101 is the product of choice for the researcher that has a limited budget and floor space, and needs turnkey equipment with a baseline process recipe, and a proven safety system.
STANDARD FEATURES
- CVDWinPrC™ system control software for real-time process control, data logging, and recipe editing.
- Preprogrammed process recipes.
- Substrate area 25 mm x 50 mm.
- Cantilevered automatic substrate loading/unloading system.
- Up to 8 mass flow-controlled UHP gas lines.
- Atmospheric and/or low pressure process configurations available.
- Dual o-ring process seals with a vacuum monitoring system to ensure leak-free operation.
- 3-zone resistance furnace for temperatures up to 1200 °C.
- Proprietary real-time cascade temperature control.
- User ability to set warnings and alarms.
- Comprehensive software and hardware safety interlocks.
- 1 year warranty.
- On-site system startup and training.
- SEMI – S2/S8 and CE compliant.
OPTIONS
- Up to an additional 4 mass flow-controlled UHP gas lines.
- Atmospheric or low pressure liquid/solid source vapor delivery – maximum of 3.
- Run/vent: stabilizes gas flows (bypassing the process tube) before flowing into process tube.
- Purge/reactant: inert gas purge for reactive gas lines.
- Air pump for air feed into system for removing carbon build up on process tube .
- Oil-based vacuum pump.
- Dry mechanical screw pump.
- Seismic mounts.
- Wheels to allow easy mobility of system into your laboratory.
- Imperial (inch) tool kit.
- EasyGas™ hazardous gas cabinets.
- EasyPanel™ UHP gas panels for argon, nitrogen, helium, oxygen.
- EasyExhaust™ exhaust gas conditioning system (scrubber/pyrolyzer).
FACILITIES REQUIREMENTS
- Electrical* : 208 VAC 60 Hz Fase 3, N, G .
- Dimensions* : 40″ Length, 49″ Width, 60″ Height.
- Cabinet Exhaust* : 300 cfm.
- Pneumatic Supply : 80 PSIG Clean DRY Air or N2 .
- Facility Nitrogen* : 10 slpm a 20 psig.
- Process Gases : Customer specified.
- *NOTE: Electrical varies with country, Facility requirements vary with system options, Consult Factory for details.
