SiliconThinfilm

APPLICATIONS

  • Silicon Thin Film Solar Cell.

SPECIFICATIONS

Sample Size 4 inch
Power Source RF 13.56MHz, VHF 60MHz
Deposition Type PE-CVD, VHFCVD
Plasma Type Direct Plasma
Substrate Temperature Max. 450°C
Temperature Uniformity < ±3%
High Vacuum Pumping Rotary + TMP + Booster
Ultimate Pressure 5 x 10-6Torr within 60min
Full Automation Control System Using PC Interface