FEATURES
- 12” OD, 7” x 7” Substrates.
- Damage Free Megasonic, Chemical, Brush Clean and Spin Dry.
- Microprocessor Controlled.
- Chemical Dispense Unit.
- Separate Solvent and Acid Drains.
- Heated N2.
- 32’’D x 28’’W footprint.
OPTIONS
- Mask or Wafer.
- Top and bottom rinse and dry.
- Brush Cleaning.
- Nitrogen and CO2 ionizers.
- Fire resistant cabinet.
