FEATURES
- Programmable Recipe management.
- Easy operation.
- Adopt Drain, Exhaust hole in bowl.
SPECIFICATIONS
| Type | Spin coater system |
| Substrate size | piece ~ up to 12″ circle |
| Rotation speed | 300 ~ 5,000rpm / ~2,000rpm (@without load), Error rate ≤1%. AC Servo Motor |
| Spin state | 50 steps, 20 recipes | Bowl | 12”, Stainless steel |
| Acceleration/Deceleration rate | Variable |
| Chuck material | Anodized AL, Acetal |
| Electric power | 220V, 5A |
| Oilless vacuum pump pressure | -650mmHg |
