MDA-60MS

FEATURES

  • Easy operation & Installation.
  • PC Operation with PLC control.
  • Image grab & Data log.
  • More than 100 Program recipes.

SPECIFICATIONS

Type Manual (PC control)
Mask size up to 7″ x 7″
Substrate size piece to 6″ x 6″
UV lamp & Power 1kW & power supply
Uniform beam size 6.25″ x 6.25″
Beam Uniformity <±5%
Beam wavelength 350 ~ 450nm
365nm Intensity 15~25mW/cm2
Alignment accuracy 1um
Process resolution 1um@1um PR thickness with
vacuum contact
Process mode Soft, Hard,
Vacuum contact & Proximity
Substrate chuck moving x,y (Manual),z &
θ (Motorized)
Options CCD BSA
UV Intensity meter