MDA2000SA

FEATURES

  • Easy operation UI.
  • PC Operation with PLC control.
  • Image grab & Data log.
  • More than 100 Program recipes.
  • Motorized joystick control.
  • Microscope position control system.

SPECIFICATIONS

Type Joystick control Semi-Auto (Mask Aligner)
Mask size up to 610 x 610(User spec.)
Substrate size 500 x 500 (User spec.)
UV lamp & Power 2kW & power supply
5 kW & power supply
Uniform beam size 600 x 600(User spec.)
Beam Uniformity <±7%
Beam wavelength 350 ~ 450nm
Process mode Soft, Hard contact
& Proximity
Substrate chuck moving x,y, z & θ (Motorized)
Options CCD BSA
UV Intensity meter