FEATURES
- Easy operation UI.
- PC Operation with PLC control.
- Image grab & Data log.
- More than 100 Program recipes.
- Microscope position control system.
- Auto Align mark searching function.
SPECIFICATIONS
| Type | Full automatic (Mask Aligner) |
| Mask size | up to 14″ x 14″ |
| Substrate size | 12″ circle |
| UV lamp & Power | 5kW lamp & power supply |
| Uniform beam size | 13.25″ x 13.25″ |
| Beam Uniformity | <±5% |
| Beam wavelength | 350 ~ 450nm |
| 365nm Intensity | 25~60mW/cm2 (5kW) |
| Alignment accuracy | 1um |
| Process resolution | 1um@1um PR thickness with vacuum contact |
| Process mode | Soft, Hard, Vacuum contact & Proximity |
| Substrate chuck moving | x,y, z & θ (Motorized) |
| Pre-aligner | ±50 μm |
| Options |
UV Intensity meter UV-LED(350nm) exposure module |
