MDA-400LJ

FEATURES

  • Easy operation & Installation.
  • Handling Substrates of Various sizes.
  • Adopt UV-LED exposure module.
  • UV-LED Life-time is long.

SPECIFICATIONS

Type Fully manual (Mask Aligner)
Mask size up to 5″ x 5″
Substrate size piece to 4″ dia
UV lamp & Power UV-LED & power supply
Uniform beam size 125mm dia
Beam Uniformity <±3%
Beam wavelength 365nm Only
365nm Intensity ~20mW/cm2
Alignment accuracy 1um
Process resolution 1um@1um PR thickness
with vacuum contact
Process mode Soft, Hard,
Vacuum contact & Proximity
Substrate chuck moving x,y,z & θ